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MSEN 6382 (Overall) | |||||
MSEN 6382 Siavash Pourkamali | |||||
Search Results
| Name | Grades | Rating | |||
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MSEN 6382 (Overall) | |||||
MSEN 6382 Siavash Pourkamali | |||||
Introduction to MEMS
MSEN 6382
Erik Jonsson School of Engineering and Computer Science
Study of micro-electro-mechanical devices and systems and their applications. Microfabrication techniques and other emerging fabrication processes for MEMS are studied along with their process physics. Principles of operations of various MEMS devices such as mechanical, optical, thermal, magnetic, chemical/biological sensors/actuators are studied. Topics include: bulk/surface micromachining, LIGA, microsensors and microactuators in multiphysics domain. 3 credit hours.
Offering Frequency: Every two years
This professor/course combination hasn't been taught in the semesters you selected. To see more grade data, try changing your filters.
Grades: 0
Median GPA: None
Mean GPA: None
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Introduction to MEMS
MSEN 6382
Erik Jonsson School of Engineering and Computer Science
Study of micro-electro-mechanical devices and systems and their applications. Microfabrication techniques and other emerging fabrication processes for MEMS are studied along with their process physics. Principles of operations of various MEMS devices such as mechanical, optical, thermal, magnetic, chemical/biological sensors/actuators are studied. Topics include: bulk/surface micromachining, LIGA, microsensors and microactuators in multiphysics domain. 3 credit hours.
Offering Frequency: Every two years
This professor/course combination hasn't been taught in the semesters you selected. To see more grade data, try changing your filters.
Grades: 0
Median GPA: None
Mean GPA: None
Click a checkbox to add something to compare.