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Technology of Plasma
MSEN 4391 (Same as EE 4391)
Erik Jonsson School of Engineering and Computer Science
Plasmas are critical to making the best electronic devices. This class will be an introduction to the technology required to make and use these plasmas. Topics include: high-vacuum technology (gas properties, pumps, pressure gauges, flow-meters, gas composition analysis) and plasma technology (etch, deposition, and lamps). Recommended: ENGR 3341. 3 credit hours.
Prerequisites: ENGR 3300 and (CE 3310 or EE 3310).
Offering Frequency: Every two years
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Technology of Plasma
MSEN 4391 (Same as EE 4391)
Erik Jonsson School of Engineering and Computer Science
Plasmas are critical to making the best electronic devices. This class will be an introduction to the technology required to make and use these plasmas. Topics include: high-vacuum technology (gas properties, pumps, pressure gauges, flow-meters, gas composition analysis) and plasma technology (etch, deposition, and lamps). Recommended: ENGR 3341. 3 credit hours.
Prerequisites: ENGR 3300 and (CE 3310 or EE 3310).
Offering Frequency: Every two years
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