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Search Results
| Name | Grades | Rating | |||
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EEMF 6382 (Overall) | |||||
A | |||||
EEMF 6382 Siavash Pourkamali | |||||
A | |||||
Search Results
| Name | Grades | Rating | |||
|---|---|---|---|---|---|
EEMF 6382 (Overall) | |||||
A | |||||
EEMF 6382 Siavash Pourkamali | |||||
A | |||||
Introduction to MEMS
EEMF 6382
Erik Jonsson School of Engineering and Computer Science
Study of micro-electro-mechanical devices and systems and their applications. Microfabrication techniques and other emerging fabrication processes for MEMS are studied along with their process physics. Principles of operations of various MEMS devices such as mechanical, optical, thermal, magnetic, chemical/biological sensors/actuators are studied. Topics include: bulk/surface micromachining, LIGA, microsensors and microactuators in multiphysics domain. 3 credit hours.
Offering Frequency: Every two years
Grades: 21
Median GPA: A
Mean GPA: 3.584
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Introduction to MEMS
EEMF 6382
Erik Jonsson School of Engineering and Computer Science
Study of micro-electro-mechanical devices and systems and their applications. Microfabrication techniques and other emerging fabrication processes for MEMS are studied along with their process physics. Principles of operations of various MEMS devices such as mechanical, optical, thermal, magnetic, chemical/biological sensors/actuators are studied. Topics include: bulk/surface micromachining, LIGA, microsensors and microactuators in multiphysics domain. 3 credit hours.
Offering Frequency: Every two years
Grades: 21
Median GPA: A
Mean GPA: 3.584
Click a checkbox to add something to compare.